Abstract: In order to miniaturize and high security requirements of fuze, this paper designs a solid-state safety switch（ON-OFF） with low ignition voltage, establishes the mathematical model of MEMS solid-state controller, and gives the function of MEMS solid-state controller. Qualifications. The thermoelectric coupling law was obtained by numerical calculation using Matlab tool. Then the COMSOL software was used to simulate the solid model of the MEMS solid-state controller, and the results similar to the numerical calculation were obtained, which verified the correctness of the theoretical model.