Abstract: The crystalline whispering gallery mode resonators have ultra-high optical quality factor（Q）, due to the advantages of high transparency, low defect and excellent water resistance. It shows a promising in high-precision sensing, nonlinear optics and optoelectronics. Based on this, we built a single point diamond cutting and polishing system based on a stable air floating rotation. By controlling the single crystal diamond tool movement with a high-precision three-axis stages, high precision machining of various lateral structures are realized. Evanescent wave coupling via the tapered fiber and prism shows that the Q of the calcium fluoride resonator exceeded 10~9 and the intrinsic Q is 3.74×10~9, and the corresponding surface roughness is 0.334 nm. The Q value still remains above 10~8 after the prism coupling stabilization package.