Abstract: Based on the principle of thermal temperature difference, this article used the finite element analysis software ANSYS to simulate the working conditions of the thermal wind sensor under two control modes of constant power and temperature-balanced. The influence of different dimensional parameters of the chip structure on the sensor’s output performance was analyzed. The research results show that the output of the sensor increases with the increase of chip side length and thickness, as well as the length of the heating element. However, the output decreases as the distance between the heating element and the sensing element increases. After optimizing the structural dimensions, the sensor’s wind direction error is less than ±2° in constant power mode, and when the wind speed is in the range of 0-15 m/s, the error is less than 10%. In temperature-balanced mode, the wind direction error is ±3°, and the effective measurement range of wind speed can reach 0-20m/s, with an error of less than 5%, and the measurement accuracy is improved.