Abstract:
A signal conditioning circuit based on TLE 2064 CDR is designed to solve the problem of the output charge signal of a piezoelectric MEMS vibration sensor with lithium niobate single crystal film being weak and difficult to collect. The circuit is composed of a charge-voltage conversion circuit(Q-V), a voltage amplification circuit, a pre-low-pass filter circuit and a post-high-pass filter circuit for the acquisition of weak signals. In addition, the piezoelectric MEMS vibration sensor is tested by the standard charge amplifier and the signal conditioning circuit designed in this paper. The test results show that the designed signal conditioning circuit has a good agreement with the output of the standard charge amplifier, and can meet the wide input charge acquisition from 5~130 pC. When the loading acceleration range is 5~20 g, the linearity between the output charge and the input acceleration is good. When the input acceleration is 5 g and the operating frequency range is 50~2 000 Hz, the output charge deviation is controlled within ±1. 6 pC, which has a good consistency. In summary, the circuit has the characteristics of high integration and good sensitivity, and has a good application prospect in weak signal acquisition.